Dynamics of Micromechanical Coriolis Vibratory Gyroscopes

Closed-Loop Compensation of the Quadrature Error in MEMS Vibratory Gyroscopes

In this paper, a simple but effective method for compensation of the quadrature error in MEMS vibratory gyroscope is provided. The proposed method does not require any change in the sensor structure, or additional circuit in the feedback path. The mathematical relations of the proposed feedback readout system were analyzed and the proposed solution assures good rejection capabilities. Based on ...

Design, Simulation, and Implementation of Two Novel Micromechanical Vibratory-Rate Gyroscopes

Control of MEMS Coriolis Vibratory Gyroscopes

This application note gives an overview of different control mechanisms for MEMS Coriolis Vibratory Gyroscopes (CVG) and how they are implemented using the commercial off-the-shelf HF2LI Lock-in Amplifier. A MEMS gyroscope is a micro-machined inertial device that can measure the angle of orientation or the angular rate of rotation. The principle relies on a vibrating structure that is suspended...

Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems

Thumbnail-sized inertial measurement systems based on Micro Electro Mechanical Systems (MEMS) technology have been perceived as a breakthrough in the field of inertial navigation. However, even as micromechanical accelerometers have seen widespread commercialization, vibratory micromechanical gyroscopes have not enjoyed similar success. Previous approaches to high-performance micromechanical gy...

Halteres for the Micromechanical Flying Insect

The mechanism which real flying insects use to detect body rotation has been simulated. The results show that an angular rate sensor can be made based on such a biological mechanism. Two types of biomimetic gyroscopes have been constructed using foils of stainless steel. The first device is connected directly to a compliant cantilever. The second device is placed on a mechanically amplifying fo...